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50700_E13 Acid Bench Etching

The equipment is an automatic chemical line designed for manufacture of semiconductors and is used for the technological process which consists in etching Si-wafers with a mixture of acids. The operator will place a basket with silicon substrates sized 8" into a sliding mechanism and will insert it into the line. Having the automatic process been triggered, the basket with Si-wafers is gradually carried forward by the manipulator and dipped in etching tubs and in rinse tubs. Baskets have a RFID code built-in and this code is read by the control system of the line in order to preselect a formula.

the facility works in Italy for an US customer

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PDF  50700_E13 Acid Bench Etching