The automatic equipment is used to etch and clean monocrystalline silicon ingots in the semiconductors manufacturing. Individual ingots of cylindrical shape are placed in a basket on the incoming conveyor belt. Having the cover of the incoming conveyor belt been closed, the working cycle takes place automatically. A bi-axial manipulator moves the basket with the ingot gradually into operating and rinse baths according to the selected working formula. The equipment comprises 4 baths placed in two sections which are separated one from another by means of partitions which are closed automatically. Before the working cycle is finished, ingots are dried with circulation of warm filtered air in a dryer and they are placed on the exit conveyor belt.
(The equipment is used in Denmark by Danish customer)